A Versatile, Analytical, Variable Pressure FE-SEM: The SU5000

Hitachi’s SU5000 is an analytical, high-resolution, variable-pressure SEM that provides high throughput, flexibility, and ease of use.

Imaging performance

  • Up to four signals in parallel for crystallography, morphology, chemistry, topography
  • Thanks to the field-free optics and variable pressure, any kind of sample can be imaged easily
  • The angularly selective BSE detector helps interpret composition and crystallography
(1) ECCI: dislocations of lattice in steel; (2) Sandstone, uncoated, low vacuum; (3) Cryo: sugar cane cross-section.

(1) ECCI: dislocations of lattice in steel; (2) Sandstone, uncoated, low vacuum; (3) Cryo: sugar cane cross-section. Image Credit: Hitachi High-Tech Europe

Simple specimen handling

  • Color navigation image and stage protection systems enable fast and risk-free navigation
  • Samples can be exchanged quickly through the front door or with the load lock (optional)
  • Bulk sample areas can be automatically imaged across multiple fields of view
  • In-situ substages can be added for dynamic experiments (such as environmental, mechanical, etc.)

Clean and flexible vacuum system

  • Both the system and samples are kept clean with the dry vacuum system, a plasma cleaner can also be added
  • Users can switch to variable pressure at any given time with just one click
  • No limitations in probe current or field of view when migrating to variable pressure

Future proof

  • Sensitive or hydrated samples can be imaged using cryo cooling or the patented Ionic Liquid from Hitachi
  • Designed for rapid and in-depth analysis using both single and multiple EDS detectors, WDS, and EBSD
  • Cathodoluminescence (CL) can be added to obtain additional data from pharmaceuticals, photonics, or minerals