Hitachi’s Regulus8230: A High Resolution Cold Field Emission Scanning Electron Microscope

The Regulus8230 from Hitachi is an ultra-high resolution cold-field emission SEM that has been improved for sensitive materials and nanostructures.

Image the most challenging specimens

  • High contrast imaging at ultra-low dose with the immersion lens detection system
  • Sub-nanometer resolution is obtained even below 1 kV
  • Comprehend internal sample data with angular adjustable HAADF, ADF and BF
  • Latest multi-detection system such as energy filtering is available

The Regulus8230: A Cold Field Emission Scanning Electron Microscope

Image Credit: Hitachi High-Tech Europe

Advanced nanoanalysis

  • Improved for windowless or annular EDS detectors, providing unusual light element analysis
  • Superfast, high sensitivity EDS can be achieved with the help of annular detectors with >1 sr solid angle

The Regulus8230: A Cold Field Emission Scanning Electron Microscope

Image Credit: Hitachi High-Tech Europe

Fast handling of samples

  • Quick sample exchange via load lock for samples with a diameter of up to 200 mm
  • Users can easily navigate on their sample or holder to determine the proper region of interest with the acquired SEM images or color optical image

Robust automation tools

  • Precise, calibrated dimension measurements can be done with the help of CD-SEM algorithms
  • Volume microscopy with automated array tomography
  • Complex or repetitive procedures can be automated with the help of advanced scripting
  • Huge sample areas can be automatically imaged over several fields of view

Future proof

  • Load encapsulated oxidation sensitive specimens (such as lithium battery components) under vacuum or inert-gas surroundings
  • Users can image hydrated or sensitive samples with Hitachi’s patented Ionic Liquid or cryo stage
  • CL can be added to obtain more data from pharmaceuticals, photonics, or minerals

While we only use edited and approved content for Azthena answers, it may on occasions provide incorrect responses. Please confirm any data provided with the related suppliers or authors. We do not provide medical advice, if you search for medical information you must always consult a medical professional before acting on any information provided.

Your questions, but not your email details will be shared with OpenAI and retained for 30 days in accordance with their privacy principles.

Please do not ask questions that use sensitive or confidential information.

Read the full Terms & Conditions.