The Regulus8230 from Hitachi is an ultra-high resolution cold-field emission SEM that has been improved for sensitive materials and nanostructures.
Image the most challenging specimens
- High contrast imaging at ultra-low dose with the immersion lens detection system
- Sub-nanometer resolution is obtained even below 1 kV
- Comprehend internal sample data with angular adjustable HAADF, ADF and BF
- Latest multi-detection system such as energy filtering is available
Image Credit: Hitachi High-Tech Europe
Advanced nanoanalysis
- Improved for windowless or annular EDS detectors, providing unusual light element analysis
- Superfast, high sensitivity EDS can be achieved with the help of annular detectors with >1 sr solid angle
Image Credit: Hitachi High-Tech Europe
Fast handling of samples
- Quick sample exchange via load lock for samples with a diameter of up to 200 mm
- Users can easily navigate on their sample or holder to determine the proper region of interest with the acquired SEM images or color optical image
Robust automation tools
- Precise, calibrated dimension measurements can be done with the help of CD-SEM algorithms
- Volume microscopy with automated array tomography
- Complex or repetitive procedures can be automated with the help of advanced scripting
- Huge sample areas can be automatically imaged over several fields of view
Future proof
- Load encapsulated oxidation sensitive specimens (such as lithium battery components) under vacuum or inert-gas surroundings
- Users can image hydrated or sensitive samples with Hitachi’s patented Ionic Liquid or cryo stage
- CL can be added to obtain more data from pharmaceuticals, photonics, or minerals