High-Performance Schottky FE-SEM: The SU7000

Hitachi’s SU7000 is an ultra-high resolution Schottky FESEM that provides nanoscale imaging and robust analysis, making it the ultimate, high-performance all-round system.

(1) Upper detector (UD): microstructure, potential contrasts; (2) Middle detector (MD): high-resolution material contrast; (3) Lower (chamber) detector (LD): topography

(1) Upper detector (UD): microstructure, potential contrasts; (2) Middle detector (MD): high-resolution material contrast; (3) Lower (chamber) detector (LD): topography. Image Credit: Hitachi High-Tech Europe

Advanced imaging and analysis combined

  • All kinds of samples can be imaged and analyzed easily with field-free optics and variable pressure operation
  • Provides sub-nanometer resolution even below 1 kV
  • [email protected] — six signals, and EDS, can be observed at the same time at a working distance of 6 mm

Flexible sample handling

  • Specimens can be easily and safely navigated through the incorporated color NaviCam
  • Specimens can be exchanged rapidly via the front door or through an exchange chamber and load lock
  • In-situ substages can be added for dynamic experiments

Clean and flexible vacuum system

  • No limitations in probe current or field of view when moving to variable pressure
  • Users can switch to variable pressure at any given time with just one click
  • With the dry vacuum system, both system and samples are kept as clean as possible; alternatively, a UV or plasma cleaner can be added.

Future proof

  • Add CL for additional info from pharmaceuticals, photonics, or minerals
  • Designed for rapid and comprehensive analysis using both single and multiple EDS detectors, WDS, and EBSD
  • Sensitive or hydrated samples can be imaged using the cryo stage or the patented Ionic Liquid from Hitachi
  • A total of 21 accessory ports provide excellent expandability