FlexSEM: A Compact, Flexible Scanning Electron Microscope

The FlexSEM from Hitachi is a benchtop or floor-standing electron microscope specially developed to integrate the flexibility and performance of a full-size SEM with the ease of a benchtop SEM.

Hitachi FlexSEM 1000 Variable-Pressure Scanning Electron Microscope

Video Credit: Hitachi High-Technologies Europe

Full-SEM imaging performance

  • Resolution comparable to a full-size SEM
  • Complete control over vacuum level, beam current, and acceleration voltage
  • Users can observe composition (BSE), morphology (SE), or both on insulating or conductive samples

High-performance elemental analysis

  • Quick and precise elemental analysis with the help of built-in EDS from leading suppliers
  • EDS up to 20 kV can be operated to provide access to more peaks
  • Exhibit true elemental distribution with the help of live peak deconvolution

Safe and easy specimen handling

  • Users can make use of the navigation camera to find the area of interest
  • Analyze broad areas with image stitching
  • Users can easily overlay and correlate their SEM and optical images
  • Users can manage huge specimens with the help of the five axes stage

Go further

  • Hydrated specimens can be imaged with a cold stage or Hitachi’s patented ionic liquid
  • Automated particle analysis for fibers, inclusions, asbestos, technical cleanliness, etc.
  • 3D surface metrology can be analyzed with the help of angle, depth, or roughness measurements
  • STEM can be added for transmitted electron imaging or CL can be added for pharmaceutical or geological samples
(1) Bacteria, 7 kV, magnification 20,000x; (2) Pharmaceutics, magnification 7,500x; (3) Paper, low-vacuum, 2,700x.

(1) Bacteria, 7 kV, magnification 20,000x; (2) Pharmaceutics, magnification 7,500x; (3) Paper, low-vacuum, 2,700x. Image Credit: Hitachi High-Technologies Europe